Fabrication and characterization of (LaxSr1-x)CoO3 thin films by RF-Sputtering.

Reference	Presenter	Authors (Institution)	Abstract
08-090	Ricardo Pereira Bonini	Bonini, R.P.(Universidade Federal de São Carlos); Gonçalves, A.M.(Universidade Federal de São Carlos); Eiras, J.A.(Universidade Federal de São Carlos); Zabotto, F.L.(Universidade Federal de São Carlos);	Currently, the silicon with platinum as bottom electrode is one of the most used substrate types in fabrication of thin films, since the  metal electrodes have excellent conductivity. However, these kind of substrate may impair the controlled growth of ceramic films due to lattice parameter at interface. To improve the desired characteristics of the ceramic films, bottom electrode based on oxides phases, such as lanthanum and strontium manganite (LSMO) have been developed. In this context, this work discuss the influence of deposition parameter (pressure, power, time) on structural, microstructural, electric and magnetic properties  of the lanthanum and strontium cobaltite (LaxSr1-x)CoO3 fabricated by RF-Sputtering. The stoichiometry was verified using the technique energy-dispersive X-ray spectroscopy  (EDX), the thickness of the films were measured using a high precision rugosimeter and in optimized stoichiometry the LSCO showed a growth of 45 nm/h. The 4-point technique was used to measure the electrical resistivity of approximately 14 µ?m and scanning electron microscopy (SEM) images and atomic force microscopy (AFM) revealed how the pressure and power parameters influence the microstructure of the LSCO. With this work, it was possible to tune  the microstructure and stoichiometry of the LSCO phase through the variation of the deposition conditions obtaining  a better match of lattice parameters between the electrode and the film.  Acknowledgment: the financial development agencies Cnpq, Capes and Fapesp
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